Compact NanoImprint Tool

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Instrument name

Compact NanoImprint Tool

Manufacturer

NIL Technology

Model

CNI V3.0-100

Specifications

Bearing substrate: for materials with a diameter of 120 mm or less, height ≥ 20 mm, expandable ≥ 45 mm

Imprint vacuum: ≥1 mbar

Temperature: ≤ 250 ℃

Maximum pressure: ≤10 bar

UV wavelength: four combined LED light sources with wavelength of 365 nm and detectable temperature in real time and overheat protection function

UV maximum power: ≥11,600 mW

Imprint software:run the CNI software, which controls everything in the imprint process (pressure, temperature, UV exposure, time, etc.)

Function and applications

The Compact NanoImprint (CNI) Tool is a plug-and-play specially developed for the laboratory. It has both thermal imprinting and UV imprinting functions, and can quickly realize imprinting in a vacuum environment. The control module consisting of the imprinting chamber of the UV cover and the connector is used to automatically control the imprinting process (pressure, temperature, UV exposure, etc.), and the imprinting chamber is vacuum compatible down to 1 mbar.

Accessories

Impression platform with 120 mm diameter (heatable to 250 °C)

Contact

Yanyun Liu

Tel.

65883196

E-mail

yyliu1@suda.edu.cn


Editor: Wenchang Zhu

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