Surface Profiler

Instrument name

Surface Profiler

Model

D-10

Manufacturer

KLA-Tencor

Specifications

Minimum positive pressure:0.03 mg

Optimal Vertical resolution:0.38 A

Maximum vertical Measurement Range: 800 um

Applications and Uses

The surface profiler is used for various materials film

thickness measurement.

Contacts

Xumin Yang

Contact number

65884226

E-mail

xmyang@suda.edu.cn