The MDPmap is a multi-function tool for spatially resolved investigation of wafer for photovoltaic and microelectronic application. It is a contactless destruction free measurement system for electrical semiconductor characterization.
Excitation with two lasers about 980 nm, excitation power is controlled over four orders of magnitude
Detection with electrical resonant circuit
Properties measureable:
Minority carrier lifetime (steady state) ØMinority carrier lifetime (non equilibrium μ-PCD)
Photoconductivity (steady state), diffusion length
Lifetime range: 0.1 μs to 100 ms
Adjustable bias light included
measurement spot 0.5 mm default, option: software controlled adjustable spot size
repeatability lifetime: +/- 1%
Accuracy lifetime: 3 Sigma < 3%
Measurement time depending on samples:
For instance 1 mm resolution 6” silicon wafer, less than 5 minutes
Contact:Haihua wu 0512-65883196
Editor:Haihua Wu